TK7874 .J33 2002
621.38173
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Jaeger, Richard C.
Introduction to microelectronic fabrication / Richard C. Jaeger.
— 2nd ed. — Upper Saddle River, N.J. : Prentice Hall, c2002. xiv, 316 p. : il. ; 24 cm. — (Modular series on solid state devices ; v. 5)
Incluye referencias bibliográficas e índice.
ISBN 0201444941. — ISBN 9780201444940 (ISBN-13)
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